Application
The instrument comes with an optical sample stage of 160 x 190mm (other sizes can be customized ), and the scanning area can be set manually or automatically. After placing the sample on the sample stage, it can be intuitively set and measured through the software interface . The user interface can display retardation value and the fast axis angle, and can provide 2D retardation distribution in the scan mode.
Application area
In Quality Control low birefringence retardation measurement, including: Smooth glass, Other transparent optical components, Laser crystal, DVD, CD disc.
In Quality verification of lithography components, including: Photomask, Fused Silica Optical Components, Calcium fluoride lens blank and window.
Features
1. In the low birefringence retardation measurement, the birefringence retardation(nm ) and fast axis angle can be measured at the same time.
2. High-precision and repeatability.
3. High-speed measurement (60pps).
4. No need to move the tested sample.
5.The measuring area can be set freely.
Technical Parameter
Technical Parameter |
Modulation frequency | 50K/ 60KHz |
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Wavelength | 632.8nm ( customizable ) |
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Signal processing method | Signal capture card |
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Measurement unit | nm ( retardation ) , ° ( fast axis ) |
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Scanning area | 170×190mm ( customizable ) |
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Measurable retardation range | 0.005nm-158nm |
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Retardation accuracy/repeatability | 0.001nm/±0.015nm |
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Angle accuracy/repeatability | 0.01°/±0.07° |
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Measurement speed | 60 times/s |
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